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Imaging of the structure of ultra-thin cobalt silicide films by inelastically backscattered electrons

Pronin, I. I. / Valdaitsev, D. A. / Faradzhev, N. S. / Gomoyunova, M. V. / Luches, P. / Valeri, S.

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Imaging of the structure of ultra-thin cobalt silicide films by inelastically backscattered electrons

Pronin, I. I. / Valdaitsev, D. A. / Faradzhev, N. S. / Gomoyunova, M. V. / Luches, P. / Valeri, S.

Imaging of the structure of ultra-thin cobalt silicide films by inelastically backscattered electrons

Pronin, I. I. / Valdaitsev, D. A. / Faradzhev, N. S. / Gomoyunova, M. V. / Luches, P. / Valeri, S.

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Document information

Title:

Imaging of the structure of ultra-thin cobalt silicide films by inelastically backscattered electrons

Contributors:

Pronin, I. I. (author) / Valdaitsev, D. A. (author) / Faradzhev, N. S. (author) / Gomoyunova, M. V. (author) / Luches, P. (author) / Valeri, S. (author)

Published in:

APPLIED SURFACE SCIENCE ; 175-176 ; 83-89

Publication date:

2001-01-01

Size:

7 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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