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Study of deep silicon etching for micro-gyroscope fabrication

Fu, L. / Miao, J. M. / Li, X. X. / Lin, R. M.

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Study of deep silicon etching for micro-gyroscope fabrication

Fu, L. / Miao, J. M. / Li, X. X. / Lin, R. M.

Study of deep silicon etching for micro-gyroscope fabrication

Fu, L. / Miao, J. M. / Li, X. X. / Lin, R. M.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Study of deep silicon etching for micro-gyroscope fabrication

Contributors:

Fu, L. (author) / Miao, J. M. (author) / Li, X. X. (author) / Lin, R. M. (author)

Published in:

APPLIED SURFACE SCIENCE ; 177 ; 78-84

Publication date:

2001-01-01

Size:

7 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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