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    Characterization of the polymerization of SU-8 photoresist and its applications in micro-electro-mechanical systems (MEMS)

    New search for: Zhang, J.
    New search for: Tan, K. L.
    New search for: Gong, H. Q.

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    Characterization of the polymerization of SU-8 photoresist and its applications in micro-electro-mechanical systems (MEMS)

    New search for: Zhang, J.
    New search for: Tan, K. L.
    New search for: Gong, H. Q.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Characterization of the polymerization of SU-8 photoresist and its applications in micro-electro-mechanical systems (MEMS)

    New search for: Zhang, J.
    New search for: Tan, K. L.
    New search for: Gong, H. Q.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
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    Document information
    Title:

    Characterization of the polymerization of SU-8 photoresist and its applications in micro-electro-mechanical systems (MEMS)

    Contributors:

    Zhang, J. (author) / Tan, K. L. (author) / Gong, H. Q. (author)

    Published in:

    POLYMER TESTING -LONDON- ; 20 ; 693-701

    Publication date:

    2001-01-01

    Size:

    9 pages

    ISSN:

    0142-9418

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.192

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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