Preparation and characterization of TiN films by electron cyclotron resonance (ECR) sputtering for diffusion barrier applications: Fid-Bau Portal

Preparation and characterization of TiN films by electron cyclotron resonance (ECR) sputtering for diffusion barrier applications

Deenamma Vargheese, K. / Mohan Rao, G. / Balasubramanian, T. V. / Kumar, S.

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Preparation and characterization of TiN films by electron cyclotron resonance (ECR) sputtering for diffusion barrier applications

Deenamma Vargheese, K. / Mohan Rao, G. / Balasubramanian, T. V. / Kumar, S.

Preparation and characterization of TiN films by electron cyclotron resonance (ECR) sputtering for diffusion barrier applications

Deenamma Vargheese, K. / Mohan Rao, G. / Balasubramanian, T. V. / Kumar, S.

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Document information

Title:

Preparation and characterization of TiN films by electron cyclotron resonance (ECR) sputtering for diffusion barrier applications

Contributors:

Deenamma Vargheese, K. (author) / Mohan Rao, G. (author) / Balasubramanian, T. V. (author) / Kumar, S. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 83 ; 242 - 248

Publication date:

2001-01-01

Size:

7 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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