Electron Energy-Loss Spectroscopy of Carbon Films Prepared by Electron-Cyclotron-Resonance Plasma Sputtering: Fid-Bau Portal

Electron Energy-Loss Spectroscopy of Carbon Films Prepared by Electron-Cyclotron-Resonance Plasma Sputtering

Murooka, Y. / Tanaka, N. / Hirono, S. / Hibino, M.

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Electron Energy-Loss Spectroscopy of Carbon Films Prepared by Electron-Cyclotron-Resonance Plasma Sputtering

Murooka, Y. / Tanaka, N. / Hirono, S. / Hibino, M.

Electron Energy-Loss Spectroscopy of Carbon Films Prepared by Electron-Cyclotron-Resonance Plasma Sputtering

Murooka, Y. / Tanaka, N. / Hirono, S. / Hibino, M.

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Check availability in my library

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Document information

Title:

Electron Energy-Loss Spectroscopy of Carbon Films Prepared by Electron-Cyclotron-Resonance Plasma Sputtering

Contributors:

Murooka, Y. (author) / Tanaka, N. (author) / Hirono, S. (author) / Hibino, M. (author)

Published in:

MATERIALS TRANSACTIONS ; 43 ; 2092-2096

Publication date:

2002-01-01

Size:

5 pages

ISSN:

1345-9678

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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