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    Anisotropic wet chemical etching of crystalline silicon: atomistic Monte-Carlo simulations and experiments

    New search for: Gosalvez, M. A.
    New search for: Nieminen, R. M.
    New search for: Kilpinen, P.
    New search for: Haimi, E.
    New search for: Lindroos, V.

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    Anisotropic wet chemical etching of crystalline silicon: atomistic Monte-Carlo simulations and experiments

    New search for: Gosalvez, M. A.
    New search for: Nieminen, R. M.
    New search for: Kilpinen, P.
    New search for: Haimi, E.
    New search for: Lindroos, V.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Anisotropic wet chemical etching of crystalline silicon: atomistic Monte-Carlo simulations and experiments

    New search for: Gosalvez, M. A.
    New search for: Nieminen, R. M.
    New search for: Kilpinen, P.
    New search for: Haimi, E.
    New search for: Lindroos, V.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
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    Document information
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    Document information
    Title:

    Anisotropic wet chemical etching of crystalline silicon: atomistic Monte-Carlo simulations and experiments

    Contributors:

    Gosalvez, M. A. (author) / Nieminen, R. M. (author) / Kilpinen, P. (author) / Haimi, E. (author) / Lindroos, V. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 178 ; 7-26

    Publication date:

    2001-01-01

    Size:

    20 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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