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Atomistic simulations of surface coverage effects in anisotropic wet chemical etching of crystalline silicon
Atomistic simulations of surface coverage effects in anisotropic wet chemical etching of crystalline silicon
Atomistic simulations of surface coverage effects in anisotropic wet chemical etching of crystalline silicon
Gosalvez, M. A. (author) / Foster, A. S. (author) / Nieminen, R. M. (author)
APPLIED SURFACE SCIENCE ; 202 ; 160-182
2002-01-01
23 pages
Article (Journal)
English
DDC:
621.35
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