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Effect of process parameters on synthesis of aluminum nitride powder prepared by chemical vapor deposition
Effect of process parameters on synthesis of aluminum nitride powder prepared by chemical vapor deposition
Effect of process parameters on synthesis of aluminum nitride powder prepared by chemical vapor deposition
Wang, M.-C. (author) / Tsai, M.-S. (author) / Wu, N.-C. (author)
JOURNAL OF MATERIALS SCIENCE ; 36 ; 3283-3290
2001-01-01
8 pages
Article (Journal)
English
DDC:
620.11
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