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Preparation of patterned GaAs structures for MEMS and MOEMS

Cambel, V. / Kicin, S. / Kuliffayova, M. / Kovacova, E. / Novak, J. / Kostic, I. / Forster, A.

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Preparation of patterned GaAs structures for MEMS and MOEMS

Cambel, V. / Kicin, S. / Kuliffayova, M. / Kovacova, E. / Novak, J. / Kostic, I. / Forster, A.

Preparation of patterned GaAs structures for MEMS and MOEMS

Cambel, V. / Kicin, S. / Kuliffayova, M. / Kovacova, E. / Novak, J. / Kostic, I. / Forster, A.

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Check availability in my library

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Document information

Title:

Preparation of patterned GaAs structures for MEMS and MOEMS

Contributors:

Cambel, V. (author) / Kicin, S. (author) / Kuliffayova, M. (author) / Kovacova, E. (author) / Novak, J. (author) / Kostic, I. (author) / Forster, A. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -AMSTERDAM THEN LAUSANNE- C ; 19 ; 161-165

Publication date:

2002-01-01

Size:

5 pages

ISSN:

0928-4931

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1 / 660

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