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Fabrication of epitaxial SiGe optical waveguide structures
Fabrication of epitaxial SiGe optical waveguide structures
Fabrication of epitaxial SiGe optical waveguide structures
Kim, Y. (author) / Berlin, D. (author) / Samoilov, A. (author)
APPLIED SURFACE SCIENCE ; 224 ; 175-178
2004-01-01
4 pages
Article (Journal)
English
DDC:
621.35
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