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    Effect of material properties on integration damage in organosilicate glass films

    New search for: Ryan, E. T.
    New search for: Martin, J.
    New search for: Junker, K.
    New search for: Wetzel, J.
    New search for: Gidley, D. W.
    New search for: Sun, J.

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    Effect of material properties on integration damage in organosilicate glass films

    New search for: Ryan, E. T.
    New search for: Martin, J.
    New search for: Junker, K.
    New search for: Wetzel, J.
    New search for: Gidley, D. W.
    New search for: Sun, J.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Effect of material properties on integration damage in organosilicate glass films

    New search for: Ryan, E. T.
    New search for: Martin, J.
    New search for: Junker, K.
    New search for: Wetzel, J.
    New search for: Gidley, D. W.
    New search for: Sun, J.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Effect of material properties on integration damage in organosilicate glass films

    Contributors:

    Ryan, E. T. (author) / Martin, J. (author) / Junker, K. (author) / Wetzel, J. (author) / Gidley, D. W. (author) / Sun, J. (author)

    Published in:

    JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 16 ; 3335-3338

    Publication date:

    2001-01-01

    Size:

    4 pages

    ISSN:

    0884-2914

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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