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Radio Frequency Discharge with Dust Particles
Radio Frequency Discharge with Dust Particles
Radio Frequency Discharge with Dust Particles
Chutov, Y. I. (author) / Goedheer, W. J. (author) / Kravchenko, O. Y. (author) / Zuz, V. M. (author) / Yan, M. (author)
MATERIALS SCIENCE FORUM ; 382 ; 69-80
2001-01-01
12 pages
Article (Journal)
English
DDC:
620.11
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