Heteroepitaxy of 3C-SiC by electron cyclotron resonance-CVD technique: Fid-Bau Portal

Heteroepitaxy of 3C-SiC by electron cyclotron resonance-CVD technique

Mandracci, P. / Chiodoni, A. / Cicero, G. / Ferrero, S. / Giorgis, F. / Pirri, C. F. / Barucca, G. / Musumeci, P. / Reitano, R.

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Heteroepitaxy of 3C-SiC by electron cyclotron resonance-CVD technique

Mandracci, P. / Chiodoni, A. / Cicero, G. / Ferrero, S. / Giorgis, F. / Pirri, C. F. / Barucca, G. / Musumeci, P. / Reitano, R.

Heteroepitaxy of 3C-SiC by electron cyclotron resonance-CVD technique

Mandracci, P. / Chiodoni, A. / Cicero, G. / Ferrero, S. / Giorgis, F. / Pirri, C. F. / Barucca, G. / Musumeci, P. / Reitano, R.

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Document information

Title:

Heteroepitaxy of 3C-SiC by electron cyclotron resonance-CVD technique

Contributors:

Mandracci, P. (author) / Chiodoni, A. (author) / Cicero, G. (author) / Ferrero, S. (author) / Giorgis, F. (author) / Pirri, C. F. (author) / Barucca, G. (author) / Musumeci, P. (author) / Reitano, R. (author)

Published in:

APPLIED SURFACE SCIENCE ; 184 ; 43-49

Publication date:

2001-01-01

Size:

7 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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