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Surface morphology of Si layers grown on SiO2
Surface morphology of Si layers grown on SiO2
Surface morphology of Si layers grown on SiO2
Shklyaev, A. A. (author) / Kozhukhov, A. S. (author) / Armbrister, V. A. (author) / Gulyaev, D. V. (author)
APPLIED SURFACE SCIENCE ; 267 ; 40-44
2013-01-01
5 pages
Article (Journal)
English
DDC:
621.35
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