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Self-organized technology of anisotropic etching of semiconductors for optoelectronics application

Dmitruk, N. L. / Borkovskaya, O. Y. / Mayeva, O. I. / Kolbasov, G. Y. / Mamontova, I. B.

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Self-organized technology of anisotropic etching of semiconductors for optoelectronics application

Dmitruk, N. L. / Borkovskaya, O. Y. / Mayeva, O. I. / Kolbasov, G. Y. / Mamontova, I. B.

Self-organized technology of anisotropic etching of semiconductors for optoelectronics application

Dmitruk, N. L. / Borkovskaya, O. Y. / Mayeva, O. I. / Kolbasov, G. Y. / Mamontova, I. B.

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Title:

Self-organized technology of anisotropic etching of semiconductors for optoelectronics application

Contributors:

Dmitruk, N. L. (author) / Borkovskaya, O. Y. (author) / Mayeva, O. I. (author) / Kolbasov, G. Y. (author) / Mamontova, I. B. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 88 ; 277 - 281

Publication date:

2002-01-01

Size:

5 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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