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Structural characterization of highly boron doped SiGe/Si heterostructures

Woitok, J. F. / Visser, C. C. / Scholtes, T. L.

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Structural characterization of highly boron doped SiGe/Si heterostructures

Woitok, J. F. / Visser, C. C. / Scholtes, T. L.

Structural characterization of highly boron doped SiGe/Si heterostructures

Woitok, J. F. / Visser, C. C. / Scholtes, T. L.

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Order at Subito €

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Document information

Title:

Structural characterization of highly boron doped SiGe/Si heterostructures

Contributors:

Woitok, J. F. (author) / Visser, C. C. (author) / Scholtes, T. L. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 89 ; 216 - 220

Publication date:

2002-01-01

Size:

5 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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