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Strain Engineering in Highly Mismatched SiGe/Si Heterostructures
Strain Engineering in Highly Mismatched SiGe/Si Heterostructures
Strain Engineering in Highly Mismatched SiGe/Si Heterostructures
Isa, Fabio (author) / Jung, Arik (author) / Salvalaglio, Marco (author) / Dasilva, Yadira Arroyo Rojas (author) / Marozau, Ivan (author) / Meduňa, Mojmír (author) / Barget, Michael (author) / Marzegalli, Anna (author) / Isella, Giovanni (author) / Erni, Rolf (author)
Materials science in semiconductor processing ; 70 ; 117-122
2017-01-01
6 pages
Article (Journal)
English
DDC:
621.38152
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