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In situ RHEED monitoring of carbon incorporation during SiGeC/Si(001) growth in a UHV-CVD system
In situ RHEED monitoring of carbon incorporation during SiGeC/Si(001) growth in a UHV-CVD system
In situ RHEED monitoring of carbon incorporation during SiGeC/Si(001) growth in a UHV-CVD system
LeThanh, V. (author) / Calmes, C. (author) / Zheng, Y. (author) / Bouchier, D. (author) / Fortuna, V. (author) / Dupuy, J. C. (author)
MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 89 ; 246 - 251
2002-01-01
6 pages
Article (Journal)
English
DDC:
620.11
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