Thin SiGe buffers with high Ge content for n-MOSFETs: Fid-Bau Portal

Thin SiGe buffers with high Ge content for n-MOSFETs

Lyutovich, K. / Bauer, M. / Kasper, E. / Herzog, H. J. / Perova, T. / Maurice, R. / Hofer, C. / Teichert, C.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Thin SiGe buffers with high Ge content for n-MOSFETs

Lyutovich, K. / Bauer, M. / Kasper, E. / Herzog, H. J. / Perova, T. / Maurice, R. / Hofer, C. / Teichert, C.

Thin SiGe buffers with high Ge content for n-MOSFETs

Lyutovich, K. / Bauer, M. / Kasper, E. / Herzog, H. J. / Perova, T. / Maurice, R. / Hofer, C. / Teichert, C.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Thin SiGe buffers with high Ge content for n-MOSFETs

Contributors:

Lyutovich, K. (author) / Bauer, M. (author) / Kasper, E. (author) / Herzog, H. J. (author) / Perova, T. (author) / Maurice, R. (author) / Hofer, C. (author) / Teichert, C. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 89 ; 341 - 345

Publication date:

2002-01-01

Size:

5 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Bauer, M. / Schollhorn, C. / Lyutovich, K. et al. | British Library Online Contents | 2002

Strain relaxation of graded SiGe buffers grown at very high rates

Rosenblad, C. / Stangl, J. / Muller, E. et al. | British Library Online Contents | 2000

Defect imaging of SiGe strain relaxed buffers grown by LEPECVD

Marchionna, S. / Virtuani, A. / Acciarri, M. et al. | British Library Online Contents | 2006

Drift diffusion and hydrodynamic simulations of Si/SiGe p-MOSFETs

Zhao, Y. P. / Watling, J. R. / Kaya, S. et al. | British Library Online Contents | 2000

Source engineering in short channel double gate vertical SiGe-MOSFETs

Mandal, S. K. / Das, S. / Maiti, C. K. | British Library Online Contents | 2005