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Si/SiGe FETs grown by MBE on a LEPECVD grown virtual substrate
Si/SiGe FETs grown by MBE on a LEPECVD grown virtual substrate
Si/SiGe FETs grown by MBE on a LEPECVD grown virtual substrate
Mack, T. (author) / Hackbarth, T. (author) / Seiler, U. (author) / Herzog, H. J. (author) / von Kanel, H. (author) / Kummer, M. (author) / Ramm, J. (author) / Sauer, R. (author)
MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 89 ; 368 - 372
2002-01-01
5 pages
Article (Journal)
English
DDC:
620.11
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