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    Stress determination in strained-Si grown on ultra-thin SiGe virtual substrates

    New search for: Perova, T. S.
    New search for: Lyutovich, K.
    New search for: Kasper, E.
    New search for: Waldron, A.
    New search for: Oehme, M.
    New search for: Moore, R. A.

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    Stress determination in strained-Si grown on ultra-thin SiGe virtual substrates

    New search for: Perova, T. S.
    New search for: Lyutovich, K.
    New search for: Kasper, E.
    New search for: Waldron, A.
    New search for: Oehme, M.
    New search for: Moore, R. A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Stress determination in strained-Si grown on ultra-thin SiGe virtual substrates

    New search for: Perova, T. S.
    New search for: Lyutovich, K.
    New search for: Kasper, E.
    New search for: Waldron, A.
    New search for: Oehme, M.
    New search for: Moore, R. A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    Stress determination in strained-Si grown on ultra-thin SiGe virtual substrates

    Contributors:

    Perova, T. S. (author) / Lyutovich, K. (author) / Kasper, E. (author) / Waldron, A. (author) / Oehme, M. (author) / Moore, R. A. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 135 ; 192-194

    Publication date:

    2006-01-01

    Size:

    3 pages

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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