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Si/SiGe FETs grown by MBE on a LEPECVD grown virtual substrate
Si/SiGe FETs grown by MBE on a LEPECVD grown virtual substrate
Si/SiGe FETs grown by MBE on a LEPECVD grown virtual substrate
Mack, T. (Autor:in) / Hackbarth, T. (Autor:in) / Seiler, U. (Autor:in) / Herzog, H. J. (Autor:in) / von Kanel, H. (Autor:in) / Kummer, M. (Autor:in) / Ramm, J. (Autor:in) / Sauer, R. (Autor:in)
MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 89 ; 368 - 372
01.01.2002
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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