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Measurement of nitrogen in Czochralski silicon by means of infrared spectroscopy

Porrini, M. / Pretto, M. G. / Scala, R.

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Measurement of nitrogen in Czochralski silicon by means of infrared spectroscopy

Porrini, M. / Pretto, M. G. / Scala, R.

Measurement of nitrogen in Czochralski silicon by means of infrared spectroscopy

Porrini, M. / Pretto, M. G. / Scala, R.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Measurement of nitrogen in Czochralski silicon by means of infrared spectroscopy

Contributors:

Porrini, M. (author) / Pretto, M. G. (author) / Scala, R. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 102 ; 228-232

Publication date:

2003-01-01

Size:

5 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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