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Local electrical characterization of SOI wafers by scanning probe microscopy

Ishizuka, Y. / Uchihashi, T. / Yoshida, H. / Kishino, S.

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Local electrical characterization of SOI wafers by scanning probe microscopy

Ishizuka, Y. / Uchihashi, T. / Yoshida, H. / Kishino, S.

Local electrical characterization of SOI wafers by scanning probe microscopy

Ishizuka, Y. / Uchihashi, T. / Yoshida, H. / Kishino, S.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Local electrical characterization of SOI wafers by scanning probe microscopy

Contributors:

Ishizuka, Y. (author) / Uchihashi, T. (author) / Yoshida, H. (author) / Kishino, S. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 91-92 ; 156 - 159

Publication date:

2002-01-01

Size:

4 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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