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Microfabrication of crosslinked polytetrafluoroethylene using synchrotron radiation direct photo-etching
Microfabrication of crosslinked polytetrafluoroethylene using synchrotron radiation direct photo-etching
Microfabrication of crosslinked polytetrafluoroethylene using synchrotron radiation direct photo-etching
Katoh, T. (author) / Yamaguchi, D. (author) / Satoh, Y. (author) / Ikeda, S. (author) / Aoki, Y. (author) / Washio, M. (author) / Tabata, Y. (author)
APPLIED SURFACE SCIENCE ; 186 ; 24-28
2002-01-01
5 pages
Article (Journal)
English
DDC:
621.35
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