Investigation of ultrathin tantalum based diffusion barrier films using AES and TEM

Dittmar, K. / Engelmann, H. J. / Peikert, M. et al. | British Library Online Contents | 2005

Thin tantalum and tantalum oxide films grown by pulsed laser deposition

Zhang, J. Y. / Boyd, I. W. | British Library Online Contents | 2000

Annealing effects of tantalum thin films sputtered on [001] silicon substrate

Liu, L. / Gong, H. / Wang, Y. et al. | British Library Online Contents | 2001

Structural and electrical properties of radio frequency magnetron sputtered tantalum oxide films: Influence of post-deposition annealing

Chandra, S. V. J. / Choi, C.-J. / Uthanna, S. et al. | British Library Online Contents | 2010

Pulsed laser deposition of tantalum oxide thin films

Zhou, M. / Fu, Z. / Yang, H. et al. | British Library Online Contents | 1997