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Investigation of ultrathin tantalum based diffusion barrier films using AES and TEM

Dittmar, K. / Engelmann, H. J. / Peikert, M. / Wieser, E. / Borany, J. V.

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Investigation of ultrathin tantalum based diffusion barrier films using AES and TEM

Dittmar, K. / Engelmann, H. J. / Peikert, M. / Wieser, E. / Borany, J. V.

Investigation of ultrathin tantalum based diffusion barrier films using AES and TEM

Dittmar, K. / Engelmann, H. J. / Peikert, M. / Wieser, E. / Borany, J. V.

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Check availability in my library

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Document information

Title:

Investigation of ultrathin tantalum based diffusion barrier films using AES and TEM

Contributors:

Dittmar, K. (author) / Engelmann, H. J. (author) / Peikert, M. (author) / Wieser, E. (author) / Borany, J. V. (author)

Published in:

APPLIED SURFACE SCIENCE ; 252 ; 185-188

Publication date:

2005-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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