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Fabrication of photonic structures by means of interference lithography and reactive ion etching

Mikulskas, I. / Mickevicius, J. / Vaitkus, J. / Tomasiunas, R. / Grigaliunas, V. / Kopustinskas, V. / Meskinis, S.

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Fabrication of photonic structures by means of interference lithography and reactive ion etching

Mikulskas, I. / Mickevicius, J. / Vaitkus, J. / Tomasiunas, R. / Grigaliunas, V. / Kopustinskas, V. / Meskinis, S.

Fabrication of photonic structures by means of interference lithography and reactive ion etching

Mikulskas, I. / Mickevicius, J. / Vaitkus, J. / Tomasiunas, R. / Grigaliunas, V. / Kopustinskas, V. / Meskinis, S.

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Title:

Fabrication of photonic structures by means of interference lithography and reactive ion etching

Contributors:

Mikulskas, I. (author) / Mickevicius, J. (author) / Vaitkus, J. (author) / Tomasiunas, R. (author) / Grigaliunas, V. (author) / Kopustinskas, V. (author) / Meskinis, S. (author)

Published in:

APPLIED SURFACE SCIENCE ; 186 ; 599-603

Publication date:

2002-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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