Annealing of Implanted Layers in (1&unknown;100) and (11&unknown;20) Oriented SiC: Fid-Bau Portal

Annealing of Implanted Layers in (1&unknown;100) and (11&unknown;20) Oriented SiC

Satoh, M.

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Annealing of Implanted Layers in (1&unknown;100) and (11&unknown;20) Oriented SiC

Satoh, M.

Annealing of Implanted Layers in (1&unknown;100) and (11&unknown;20) Oriented SiC

Satoh, M.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Annealing of Implanted Layers in (1&unknown;100) and (11&unknown;20) Oriented SiC

Contributors:

Satoh, M. (author)

Published in:

MATERIALS SCIENCE FORUM ; 389/393 ; 773-778

Publication date:

2002-01-01

Size:

6 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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