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Direct Observation of the Solid-Phase Recrystallization of Self-Implanted Amorphous SiC Layer on (11&unknown;20), (1&unknown;100), and (0001) Oriented 6H-SiC
Direct Observation of the Solid-Phase Recrystallization of Self-Implanted Amorphous SiC Layer on (11&unknown;20), (1&unknown;100), and (0001) Oriented 6H-SiC
Direct Observation of the Solid-Phase Recrystallization of Self-Implanted Amorphous SiC Layer on (11&unknown;20), (1&unknown;100), and (0001) Oriented 6H-SiC
Eryu, O. (author) / Matsuo, D. (author) / Abe, K. (author) / Nakashima, K. (author)
MATERIALS SCIENCE FORUM ; 389/393 ; 843-846
2002-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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