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Influence of Rapid Thermal Annealing on Ni/6H-SiC Contact Formation

Agueev, O. A. / Svetlichnyi, A. M. / Razgonov, R. N.

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Influence of Rapid Thermal Annealing on Ni/6H-SiC Contact Formation

Agueev, O. A. / Svetlichnyi, A. M. / Razgonov, R. N.

Influence of Rapid Thermal Annealing on Ni/6H-SiC Contact Formation

Agueev, O. A. / Svetlichnyi, A. M. / Razgonov, R. N.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Influence of Rapid Thermal Annealing on Ni/6H-SiC Contact Formation

Contributors:

Agueev, O. A. (author) / Svetlichnyi, A. M. (author) / Razgonov, R. N. (author)

Published in:

MATERIALS SCIENCE FORUM ; 389/393 ; 901-904

Publication date:

2002-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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