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Rapid thermal annealing of ITO films

Song, S. / Yang, T. / Liu, J. / Xin, Y. / Li, Y. / Han, S.

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Rapid thermal annealing of ITO films

Song, S. / Yang, T. / Liu, J. / Xin, Y. / Li, Y. / Han, S.

Rapid thermal annealing of ITO films

Song, S. / Yang, T. / Liu, J. / Xin, Y. / Li, Y. / Han, S.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Rapid thermal annealing of ITO films

Contributors:

Song, S. (author) / Yang, T. (author) / Liu, J. (author) / Xin, Y. (author) / Li, Y. (author) / Han, S. (author)

Published in:

APPLIED SURFACE SCIENCE ; 257 ; 7061-7064

Publication date:

2011-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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