In Situ Doping of 3C-SiC Grown on (0001) Sapphire Substrates by LPCVD: Fid-Bau Portal

In Situ Doping of 3C-SiC Grown on (0001) Sapphire Substrates by LPCVD

Sun, G. S. / Luo, M. C. / Wang, L. / Zhu, S. R. / Li, J. M. / Zeng, Y. P. / Lin, L. Y.

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In Situ Doping of 3C-SiC Grown on (0001) Sapphire Substrates by LPCVD

Sun, G. S. / Luo, M. C. / Wang, L. / Zhu, S. R. / Li, J. M. / Zeng, Y. P. / Lin, L. Y.

In Situ Doping of 3C-SiC Grown on (0001) Sapphire Substrates by LPCVD

Sun, G. S. / Luo, M. C. / Wang, L. / Zhu, S. R. / Li, J. M. / Zeng, Y. P. / Lin, L. Y.

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Title:

In Situ Doping of 3C-SiC Grown on (0001) Sapphire Substrates by LPCVD

Contributors:

Sun, G. S. (author) / Luo, M. C. (author) / Wang, L. (author) / Zhu, S. R. (author) / Li, J. M. (author) / Zeng, Y. P. (author) / Lin, L. Y. (author)

Published in:

MATERIALS SCIENCE FORUM ; 389/393 ; 339-342

Publication date:

2002-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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