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In Situ Doping of 3C-SiC Grown on (0001) Sapphire Substrates by LPCVD
In Situ Doping of 3C-SiC Grown on (0001) Sapphire Substrates by LPCVD
In Situ Doping of 3C-SiC Grown on (0001) Sapphire Substrates by LPCVD
Sun, G. S. (author) / Luo, M. C. (author) / Wang, L. (author) / Zhu, S. R. (author) / Li, J. M. (author) / Zeng, Y. P. (author) / Lin, L. Y. (author)
MATERIALS SCIENCE FORUM ; 389/393 ; 339-342
2002-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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