Vacancy Defects in As-Polished and in High-Fluence H^+-Implanted 6H-SiC Detected by Slow Positron Annihilation Spectroscopy: Fid-Bau Portal

Vacancy Defects in As-Polished and in High-Fluence H^+-Implanted 6H-SiC Detected by Slow Positron Annihilation Spectroscopy

Barthe, M.-F. / Desgardin, P. / Henry, L. / Corbel, C. / Britton, D. T. / Kogel, G. / Sperr, P. / Triftshauser, W. / Vicente, P. / diCioccio, L.

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Vacancy Defects in As-Polished and in High-Fluence H^+-Implanted 6H-SiC Detected by Slow Positron Annihilation Spectroscopy

Barthe, M.-F. / Desgardin, P. / Henry, L. / Corbel, C. / Britton, D. T. / Kogel, G. / Sperr, P. / Triftshauser, W. / Vicente, P. / diCioccio, L.

Vacancy Defects in As-Polished and in High-Fluence H^+-Implanted 6H-SiC Detected by Slow Positron Annihilation Spectroscopy

Barthe, M.-F. / Desgardin, P. / Henry, L. / Corbel, C. / Britton, D. T. / Kogel, G. / Sperr, P. / Triftshauser, W. / Vicente, P. / diCioccio, L.

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Title:

Vacancy Defects in As-Polished and in High-Fluence H^+-Implanted 6H-SiC Detected by Slow Positron Annihilation Spectroscopy

Contributors:

Barthe, M.-F. (author) / Desgardin, P. (author) / Henry, L. (author) / Corbel, C. (author) / Britton, D. T. (author) / Kogel, G. (author) / Sperr, P. (author) / Triftshauser, W. (author) / Vicente, P. (author) / diCioccio, L. (author)

Published in:

MATERIALS SCIENCE FORUM ; 389/393 ; 493-496

Publication date:

2002-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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