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Hydrogen Incorporation into SiC Using Plasma-Hydrogenation

Koshka, Y. / Draper, W. A. / Lakshman, R. Y. / Scofield, J. / Saddow, S. E.

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Hydrogen Incorporation into SiC Using Plasma-Hydrogenation

Koshka, Y. / Draper, W. A. / Lakshman, R. Y. / Scofield, J. / Saddow, S. E.

Hydrogen Incorporation into SiC Using Plasma-Hydrogenation

Koshka, Y. / Draper, W. A. / Lakshman, R. Y. / Scofield, J. / Saddow, S. E.

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Check availability in my library

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Document information

Title:

Hydrogen Incorporation into SiC Using Plasma-Hydrogenation

Contributors:

Koshka, Y. (author) / Draper, W. A. (author) / Lakshman, R. Y. (author) / Scofield, J. (author) / Saddow, S. E. (author)

Published in:

MATERIALS SCIENCE FORUM ; 389/393 ; 569-572

Publication date:

2002-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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