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Improvement of interface morphology between titanium-silicide and poly-Si thin film using Ar plasma treatment
Improvement of interface morphology between titanium-silicide and poly-Si thin film using Ar plasma treatment
Improvement of interface morphology between titanium-silicide and poly-Si thin film using Ar plasma treatment
Choi, J. M. (author) / Kim, D. J. (author) / Kim, H. I. (author) / So, M. G. (author)
JOURNAL OF MATERIALS SCIENCE LETTERS ; 21 ; 325-328
2002-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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