Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Improvement of interface morphology between titanium-silicide and poly-Si thin film using Ar plasma treatment
Improvement of interface morphology between titanium-silicide and poly-Si thin film using Ar plasma treatment
Improvement of interface morphology between titanium-silicide and poly-Si thin film using Ar plasma treatment
Choi, J. M. (Autor:in) / Kim, D. J. (Autor:in) / Kim, H. I. (Autor:in) / So, M. G. (Autor:in)
JOURNAL OF MATERIALS SCIENCE LETTERS ; 21 ; 325-328
01.01.2002
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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