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    Characterisation of polysilicon gate microstructures for 0.5 mm CMOS devices using transmission electron microscopy and atomic force microscopy images

    New search for: Ahmad, I.
    New search for: Omar, A.
    New search for: Hussain, A.
    New search for: Mikdad, A.

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    Characterisation of polysilicon gate microstructures for 0.5 mm CMOS devices using transmission electron microscopy and atomic force microscopy images

    New search for: Ahmad, I.
    New search for: Omar, A.
    New search for: Hussain, A.
    New search for: Mikdad, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Characterisation of polysilicon gate microstructures for 0.5 mm CMOS devices using transmission electron microscopy and atomic force microscopy images

    New search for: Ahmad, I.
    New search for: Omar, A.
    New search for: Hussain, A.
    New search for: Mikdad, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
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    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Characterisation of polysilicon gate microstructures for 0.5 mm CMOS devices using transmission electron microscopy and atomic force microscopy images

    Contributors:

    Ahmad, I. (author) / Omar, A. (author) / Hussain, A. (author) / Mikdad, A. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 191 ; 362-367

    Publication date:

    2002-01-01

    Size:

    6 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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