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    X-Ray Stress Measurements of TiCN Thin Films

    New search for: Gotoh, M.
    New search for: Murotani, T.
    New search for: Sasaki, T.
    New search for: Hirose, Y.

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    X-Ray Stress Measurements of TiCN Thin Films

    New search for: Gotoh, M.
    New search for: Murotani, T.
    New search for: Sasaki, T.
    New search for: Hirose, Y.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    X-Ray Stress Measurements of TiCN Thin Films

    New search for: Gotoh, M.
    New search for: Murotani, T.
    New search for: Sasaki, T.
    New search for: Hirose, Y.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    X-Ray Stress Measurements of TiCN Thin Films

    Contributors:

    Gotoh, M. (author) / Murotani, T. (author) / Sasaki, T. (author) / Hirose, Y. (author)

    Published in:

    MATERIALS SCIENCE FORUM ; 404/407 ; 677-682

    Publication date:

    2002-01-01

    Size:

    6 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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