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Phase Transformations of Micromachined Polysilicon Films under Nanoindentations
Phase Transformations of Micromachined Polysilicon Films under Nanoindentations
Phase Transformations of Micromachined Polysilicon Films under Nanoindentations
Ding, J.-N. (author)
2002-01-01
4 pages
Article (Journal)
English
DDC:
515.355
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