A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
Surface Roughness Effect on the Tensile Strength of Micromachined Polysilicon Films
Surface Roughness Effect on the Tensile Strength of Micromachined Polysilicon Films
Surface Roughness Effect on the Tensile Strength of Micromachined Polysilicon Films
Ding, J.-N. (author)
2002-01-01
4 pages
Article (Journal)
English
DDC:
515.355
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