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A platform for research: civil engineering, architecture and urbanism
Evaluation of Mechanical Properties and Strain Criterion for Realibility Design of Micromachined Polysilicon Thin Films
Evaluation of Mechanical Properties and Strain Criterion for Realibility Design of Micromachined Polysilicon Thin Films
Evaluation of Mechanical Properties and Strain Criterion for Realibility Design of Micromachined Polysilicon Thin Films
Ding, J.-N. (author)
2002-01-01
4 pages
Article (Journal)
English
DDC:
515.355
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