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    Effects of Local Texture and Grain Structure on the Sputtering Performance of Tantalum

    New search for: Michaluk, C. A.
    New search for: Field, D. P.
    New search for: Nibur, K. A.
    New search for: Wright, S. I.
    New search for: Witt, R. A.
    New search for: Lee, D. N.

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    Effects of Local Texture and Grain Structure on the Sputtering Performance of Tantalum

    New search for: Michaluk, C. A.
    New search for: Field, D. P.
    New search for: Nibur, K. A.
    New search for: Wright, S. I.
    New search for: Witt, R. A.
    New search for: Lee, D. N.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Effects of Local Texture and Grain Structure on the Sputtering Performance of Tantalum

    New search for: Michaluk, C. A.
    New search for: Field, D. P.
    New search for: Nibur, K. A.
    New search for: Wright, S. I.
    New search for: Witt, R. A.
    New search for: Lee, D. N.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

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    Document information
    Title:

    Effects of Local Texture and Grain Structure on the Sputtering Performance of Tantalum

    Contributors:

    Michaluk, C. A. (author) / Field, D. P. (author) / Nibur, K. A. (author) / Wright, S. I. (author) / Witt, R. A. (author) / Lee, D. N.

    Published in:

    Textures of Materials ICOTOM 13 Part 2 ; 1615-1620

    MATERIALS SCIENCE FORUM ; 408/412

    Publication date:

    2002-01-01

    Size:

    6 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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