Through-thickness texture gradient of tantalum sputtering target: Fid-Bau Portal

Through-thickness texture gradient of tantalum sputtering target

Deng, C. / Liu, S. F. / Hao, X. B. / Ji, J. L. / Liu, Q. / Fan, H. Y.

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Through-thickness texture gradient of tantalum sputtering target

Deng, C. / Liu, S. F. / Hao, X. B. / Ji, J. L. / Liu, Q. / Fan, H. Y.

Through-thickness texture gradient of tantalum sputtering target

Deng, C. / Liu, S. F. / Hao, X. B. / Ji, J. L. / Liu, Q. / Fan, H. Y.

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Check availability in my library

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Document information

Title:

Through-thickness texture gradient of tantalum sputtering target

Contributors:

Deng, C. (author) / Liu, S. F. (author) / Hao, X. B. (author) / Ji, J. L. (author) / Liu, Q. (author) / Fan, H. Y. (author)

Published in:

RARE METALS -BEIJING- ENGLISH EDITION ; 36 ; 523-526

Publication date:

2017-01-01

Size:

4 pages

ISSN:

1001-0521

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 669

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