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Investigation of carbon nitride films at various arc currents deposited by vacuum cathodic arc method

Zhou, Z. M. / Xia, L. F. / Sun, Y.

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Investigation of carbon nitride films at various arc currents deposited by vacuum cathodic arc method

Zhou, Z. M. / Xia, L. F. / Sun, Y.

Investigation of carbon nitride films at various arc currents deposited by vacuum cathodic arc method

Zhou, Z. M. / Xia, L. F. / Sun, Y.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Investigation of carbon nitride films at various arc currents deposited by vacuum cathodic arc method

Contributors:

Zhou, Z. M. (author) / Xia, L. F. (author) / Sun, Y. (author)

Published in:

JOURNAL OF MATERIALS SCIENCE LETTERS ; 21 ; 1329 - 1331

Publication date:

2002-01-01

Size:

3 pages

ISSN:

0261-8028

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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