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Generation of Chrome Masks with Micrometer-Scale Features Using Microlens Lithography

Wu, H. / Odom, T. W. / Whitesides, G. M.

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Generation of Chrome Masks with Micrometer-Scale Features Using Microlens Lithography

Wu, H. / Odom, T. W. / Whitesides, G. M.

Generation of Chrome Masks with Micrometer-Scale Features Using Microlens Lithography

Wu, H. / Odom, T. W. / Whitesides, G. M.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Generation of Chrome Masks with Micrometer-Scale Features Using Microlens Lithography

Contributors:

Wu, H. (author) / Odom, T. W. (author) / Whitesides, G. M. (author)

Published in:

ADVANCED MATERIALS -DEERFIELD BEACH THEN WEINHEIM- ; 14 ; 1213-1216

Publication date:

2002-01-01

Size:

4 pages

ISSN:

0935-9648

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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