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Electron Energy-Loss Spectroscopy of Carbon Films Prepared by Electron-Cyclotron-Resonance Plasma Sputtering
Electron Energy-Loss Spectroscopy of Carbon Films Prepared by Electron-Cyclotron-Resonance Plasma Sputtering
Electron Energy-Loss Spectroscopy of Carbon Films Prepared by Electron-Cyclotron-Resonance Plasma Sputtering
Murooka, Y. (Autor:in) / Tanaka, N. (Autor:in) / Hirono, S. (Autor:in) / Hibino, M. (Autor:in)
MATERIALS TRANSACTIONS ; 43 ; 2092-2096
01.01.2002
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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