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Formation of wavelike microscopic topography on surface of semiconductor subjected to sputtering by a high-current ion beam
Formation of wavelike microscopic topography on surface of semiconductor subjected to sputtering by a high-current ion beam
Formation of wavelike microscopic topography on surface of semiconductor subjected to sputtering by a high-current ion beam
Grigor ev, A. I. (author) / Shiryaev, S. O. (author) / Belonozhko, D. F. (author) / Golovanov, A. S. (author)
2000-01-01
5 pages
Article (Journal)
English
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