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Strain engineering, self-assembly, and nanoarchitectures in thin SiGe films on Si

Woll, A. R. / Rugheimer, P. / Lagally, M. G.

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Strain engineering, self-assembly, and nanoarchitectures in thin SiGe films on Si

Woll, A. R. / Rugheimer, P. / Lagally, M. G.

Strain engineering, self-assembly, and nanoarchitectures in thin SiGe films on Si

Woll, A. R. / Rugheimer, P. / Lagally, M. G.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Strain engineering, self-assembly, and nanoarchitectures in thin SiGe films on Si

Contributors:

Woll, A. R. (author) / Rugheimer, P. (author) / Lagally, M. G. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 96 ; 94-101

Publication date:

2002-01-01

Size:

8 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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