Influence of the Plasma Regime on the Structural, Optical and Transport Properties of a-Si:H Thin Films: Fid-Bau Portal

Influence of the Plasma Regime on the Structural, Optical and Transport Properties of a-Si:H Thin Films

Aguas, H. / Martins, R. / Fortunato, E.

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Influence of the Plasma Regime on the Structural, Optical and Transport Properties of a-Si:H Thin Films

Aguas, H. / Martins, R. / Fortunato, E.

Influence of the Plasma Regime on the Structural, Optical and Transport Properties of a-Si:H Thin Films

Aguas, H. / Martins, R. / Fortunato, E.

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Document information

Title:

Influence of the Plasma Regime on the Structural, Optical and Transport Properties of a-Si:H Thin Films

Contributors:

Aguas, H. (author) / Martins, R. (author) / Fortunato, E. (author) / Vieira, T.

Published in:

Proceedings of the 1^s^t International Materials Symposium, Coimbra, Portugal, April 9-11, 2001 ; 583-586

KEY ENGINEERING MATERIALS

Publication date:

2002-01-01

Size:

4 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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